Engineering and Equipment Support Services

Capital equipment design and engineering
Outsource Manufacturing (capital equipment, module, and subassembly)
Solar back-end foundry services
Automation engineering CIP programs
Automation engineering design

Capital Equipment Repair Services

Equipment refurbishment, install, de-install, extraction
Operational excellence programs
Short and long term contract fab support services
RF repair and refurbishment
Training for front end equipment

CMP, Plasma and Thermal Processing Equipment (Check all that applies)
Production Wafer Stripping Systems
Plasma Deposition Systems
Reactive Ion Etch Systems with a Vacuum Load-Lock
PECVD Systems for Nitride and Oxide Deposition
PECVD Systems for TEOS oxide and DES nitride deposition
Diffusion, annealing
CMP
Poly, oxide, metal etch

Automation, Inspection and Lithography (Check all that applies)
Automated wet stations
Automated wafer transfer systems
Refurbished/used front end capital equipment
Robots for edge grip and flip for wafers, photomasks and FPDs
HDD components inspection
Wafer scanning
TSV and deep trench measurement
Wafer inspection
Field-of-view vision metrology software
CD measurement system
Thickness, warp and bow measurement
Non-Contact optical profilometer
Automated particle, scratch, incomplete die detection system
Automated detection of metalization errors, registration problems, probe marks and stains
Patented technology provides illumination for unique and demanding applications
Customized metrology and defect detection systems
Safelight shields for fluorescent lamps to protect photoresist
Carbon nanotubes for AFMs, customizable protrusion length and angle

Single Wafer Chemical and Solvent Processing, Monitoring and Dispensing (Check all that applies)
In-situ process monitoring
Stream and spray etch processing
Backside and bevel wet etch
Backside thinning and stress relief
Single and double-sided PVA brush scrubbing
Single wafer Megasonic scrub
Megasonic systems for cleaning, etching
Piranha processing
Ozone/DI water mixing
Drying technology
Solvent immersion processing
High pressure jet scrubbing
High velocity fan spray
Closed and open cup spin coating
Backside clean EBR technilogy
Hot plate processing
Bulk chemical management and blending systems
Photoresist strip and metal lift-off

Chemical and Solvent Processing, Monitoring and Dispensing (Check all that applies)
Manual, semi and fully automated wet processing tools
Chemical etching/cleaning/developing systems
Plating equipment; batch and single-wafer
IPA aerosol dryer
Vertical/horizontal tube and parts cleaners and storage
Custom stainless steel solvent tools
Chemical concentration monitoring
Chemical heating
Megasonic systems for cleaning, etching
Quartz, PVDF, stainless steel vessels for wet processing
Ultrasonic systems for cleaning and rinsing
Marangoni-type/aerosol wafer drying
Molded quartz vessels for cleaning/etching/stripping
Stainless steel solvent processing stations
Chemical support equipment (i.e., cabinets and carts)
Chemical, solvent and CMP blending, distribution and recovery products

Solar (Check all that applies)
Solar panel equipment, design and manufacturing
Solar panel contract manufacturing
PV module manufacturing
PV power plant construction and operation
PV module production capacity; 200 MW in 2010