Please send me information on the following:
Chemical and Solvent Processing, Monitoring
and Dispensing (Check all that applies)
Manual, semi and fully automated wet processing tools
Chemical etching/cleaning/developing systems
Substrate rinser/dryers
Vertical/horizontal tube and parts cleaners and storage
Custom stainless steel solvent tools
Chemical concentration monitoring
Chemical heating
Megasonic systems for cleaning, etching
Quartz, PVDF, stainless steel vessels for wet processing
Ultrasonic systems for cleaning and rinsing
Marangoni substrate drying
Molded quartz vessels for cleaning/etching/stripping
Stainless steel solvent processing stations
Chemical support equipment (i.e., cabinets and carts)
Chemical, solvent and CMP blending, distribution and recovery
products
Single Wafer Chemical and Solvent Processing, Monitoring
and Dispensing (Check all that applies)
In-situ process monitoring
Stream and spray etch processing
Backside and bevel wet etch
Backside thinning and stress relief
Single and double-sided PVA brush scrubbing
Single wafer Megasonic scrub
Megasonic systems for cleaning, etching
Piranha processing
Ozone/DI water mixing
Drying technology
Solvent immersion processing
High pressure jet scrubbing
High velocity fan spray
Closed and open cup spin coating
Backside clean EBR technilogy
Hot plate processing
Bulk chemical management and blending systems
Photoresist strip and metal lift-off
Automation, Inspection and Lithography (Check all
that applies)
Automated wet stations
Automated wafer transfer systems
Refurbished/used front end capital equipment
Robots for edge grip and flip for wafers, photomasks and
FPDs
HDD components inspection
Wafer scanning
Field-of-view vision metrology software
CD measurement system
Thickness, warp and bow measurement
Non-Contact optical profilometer
Automated particle, scratch, incomplete die detection system
Automated detection of metalization errors, registration
problems, probe marks and stains
Patented technology provides illumination for unique and
demanding applications
Customized metrology and defect detection systems
Safelight shields for fluorescent lamps to protect photoresist
Etching, Deposition and Annealing (Check all that
applies)
Production Wafer Stripping Systems
Plasma Deposition Systems
Reactive Ion Etch Systems with a Vacuum Load-Lock
PECVD Systems for Nitride and Oxide Deposition
PECVD Systems for TEOS oxide and DES nitride deposition
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